Microsystem Technology
Wolfgang Menz and Oliver Paul
Genre:technical literature
Language:English
Type:PDF book
Publisher:John Wiley & Sons Limited
Publication date:08.12.2022
Price:$392.63
Views:34
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.